"Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applicati

"Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applicati

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"Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices" - "" ("Zuka
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